Laser Direct Writing of Highly Ordered Two‐Level Hierarchical Microstructures for Flexible Piezoresistive Sensor with Enhanced Sensitivity

• DOI: 10.1002/admi.202101596
• Publication Date: 2021-11-26T11:29:53Z
• Authors: Chenying Zhang; Rui Chen; Chiqian Xiao; Huiyan Zhao; Yuxin Wang; Da Geng; Songyue Chen; Tao Luo; Wei Zhou
• Keywords: Piezoresistive effect; SIGNAL (programming language)

Abstract With the development of micro‐nano manufacturing technology, various hierarchical microstructures (HMs) are used to improve sensitivity and measurement range flexible pressure sensors. However, fabrication highly ordered HMs in simple, fast, low‐cost ways remains a great challenge. In this work, laser direct writing technology is fabricate enhance piezoresistive The show lateral expansion with increasing due good flexibility small force bearing areas, resulting more significant change contact area than single‐level microstructures, which leads an enhanced sensitivity. Two case studies conducted verify performance sensor processed HMs. Experimental results that pulsating blood signal radial artery can be detected by attaching on wrist. When attached neck, it also detect vibration vocal cord when speaking. These successfully demonstrate potential processing fabricating achieve sensitive sensors for applications, such as wearable health monitoring human–computer interactions.