Surface Coating of Bonded PDMS Microchannels by Atmospheric Pressure Microplasma

Microplasma Hexamethyldisiloxane Polydimethylsiloxane Microchannel Plasma polymerization Nanofluidics Surface Modification
DOI: 10.1002/ppap.201300123 Publication Date: 2014-01-23T14:30:10Z
ABSTRACT
The surface coating of sealed microchannels is useful for a variety applications in microfluidics and lab-on-a-chip devices. This paper demonstrates novel technique bonded polydimethylsiloxane (PDMS) microchannel using atmospheric pressure microplasma. Plasma was generated by two types electrode arrangements: (i) needle–aluminum foil with dielectric barrier (DB) (ii) needle–needle configuration without DB. microplasma the DB selected deposition this study. monomer ethylenediamine used as organic precursor plasma polymerization. Oil-in-water microemulsions were formed T-shaped order to test stability durability polymerized films. coatings characterized Fourier transform infrared spectroscopy, X-ray photoelectron atomic force microscopy, contact angle measurements.
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