P‐6.11: Sensor Technology ‐ A new chance for low generation TFT production line

• DOI: 10.1002/sdtp.12802
• Publication Date: 2018-11-28T21:08:54Z
• Authors: Zhidong Wang; Ronghua Lan; Lijia Zhou; Junrui Zhang; Rongjian Yan; Jiuyang Cheng; Quanguo Zhou; Meng Guo; Yongqiang Li; Yancheng Lu
• Keywords: Production line

We analyzed several sensor technology which have good compatibility with current TFF process, including Digital X‐Ray Detector, Glass‐substrate Pressure Sensor, Memory, Antenna and MEMS Devices. The above offers some directions for low generation TFT production line's transition.