Imaging surfaces of nano‐scale roughness by atomic force microscopy with carbon nanotubes as tips: a comparative study

• DOI: 10.1002/sia.3727
• Publication Date: 2011-01-17T08:40:29Z
• Authors: Martin Munz; Jae‐Ho Kim; Oliver Krause; Debdulal Roy
• Keywords: Nanometre

Abstract Accurate knowledge of the nanoroughness surfaces is crucial for many applications related to optics, electronics or tribology. Although atomic force microscopy (AFM) can image with a nanometre spatial resolution, finite size standard tips means that pores, pits grooves dimensions similar smaller than tip apex will not be accurately imaged. Furthermore, are made silicon nitride and prone wear. Mitigation may arise from availability AFM carbon nanotube (CNT) at their foremost end. This study compares imaging performance ultrasharp Si tips, CNT prepared by Langmuir‐Blodgett (LB) technique, chemical vapour deposition (CVD) technique. The free length in range 80–200 600–750 nm, respectively. A polycrystalline niobium film surface imaged shows nanoroughness. measurements demonstrate allow excellent if scan parameters adjusted very carefully. Nevertheless, some cases distortions found. measured average grain diameter 19.9 ± 3.6 nm case LB 18.0 3.3 CVD. In addition cross‐sections topography images, also power spectral density (PSD) analyzed. An empirical approach readout characteristic suggested involves first derivative decadic logarithm PSD. Copyright © 2011 John Wiley & Sons, Ltd.