Intercomparison of methods for separation of REELS elastic peak intensities for determination of IMFP

• DOI: 10.1002/sia.945
• Publication Date: 2002-08-25T20:43:26Z
• Authors: S. Tougaard; M. Krawczyk; A. Jablonski; J. Pavluch; J. Toth; D. Varga; G. Gergely; M. Menyhard; A. Sulyok
• Keywords: Analyser; Root mean square

Abstract The consistency and accuracy of inelastic electron mean free paths (IMFPs) determined from comparison the intensity elastically reflected electrons with theoretical calculations were studied. variation experimental geometry, spectrometer energy resolution procedure for background subtraction was Four different types spectrometers— double pass cylindrical mirror analyser (CMA) pre‐retarded CMA, hemispherical (HSA) retarding field (RFA)— widely geometries resolutions, placed in four laboratories three countries, used. methods (Shirley, linear, Tougaard ELPSEP) applied to isolate elastic peak spectra. It found that IMFPs data CMA deviated considerably more (by a factor 2) average values as well IMFP than other spectrometers. therefore excluded statistical analysis. root square (RMS) deviation function fitted 1.6–2.8 Å, depending on method, it is smallest method. RMS calculated by Tanuma et al. 2.1–3.2 again value percentage results using 12.6%. point conclusion major contribution inaccuracies this method not but rather lack presently available models scattering, i.e. atomic scattering cross‐sections effects crystallinity are included models. Copyright © 2001 John Wiley & Sons, Ltd.