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Spectroellipsometric measurement of refractive index and thickness for HfO2 films on optical glass

0103 physical sciences 01 natural sciences
DOI: 10.1007/bf00661757 Publication Date: 2004-11-28T03:26:40Z
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AUTHORS (3)
V. A. Odarich
V. I. Panasyuk
V. S. Stashchuk
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