A study on the micro tooling for micro/nano milling

• DOI: 10.1007/s00170-010-2856-3
• Publication Date: 2010-07-31T13:03:45Z
• Authors: Xiang Cheng; Zhigang Wang; Kazuo Nakamoto; Kazuo Yamazaki
• Keywords: End mill; Macro

Many researches have studied the micro tools either by simulations or experiments showing that play very important roles in micro/nano machining, and tool geometries a direct impact on final machining quality. Commercially available milling are usually simply made from downsizing of macro tools, which may not be able to accurately fabricated. Custom been created some researchers, but no design criteria for introduced. The above factors constrain development effective consequently milling. Based former researcher’s work, this paper tries introduce custom tooling. Firstly, extent typical studied, their drawback/limitations summarized. Secondly, experimental evaluations key processed. Thirdly, proposed, corresponding process is Then, new hexagonal end mill has designed based these criteria. Finally, polycrystalline diamond with diameter 0.5 mm was fabricated wire electrical discharge evaluation processed nano center. Experimental results show newly can achieve submicron level surface roughness simultaneously high-accuracy side bottom capabilities.