Improved semirigid bonnet tool for high-efficiency polishing on large aspheric optics

• DOI: 10.1007/s00170-016-8901-0
• Publication Date: 2016-05-18T04:45:35Z
• Authors: Chunjin Wang; Zhenzhong Wang; Quanjin Wang; Xiaolong Ke; Bo Zhong; Yinbiao Guo; Qiao Xu
• Keywords: 0209 industrial biotechnology; 02 engineering and technology

High-efficiency polishing tool is urgently needed to meet the increasing demand of high accuracy optics, especially large aspheric optics. The purpose of this paper is to present an improved semirigid bonnet tool which can deliver high-efficiency polishing on aspheric optics together with the ability to diminish the grinding feature. Its structure is optimized from the former one to solve the defects. The tool influence function is also modeled here based on finite element analysis method. Testing experiments which prove that the improved semirigid bonnet could be used in the pre-polishing stage for plane or aspheric optics to dramatically shorten the process cycle, especially for large size optics, are also conducted. Besides, it also can be used at the early stage of the corrective polishing.