Review on polishing technology of small-scale aspheric optics

• DOI: 10.1007/s00170-021-07202-3
• Publication Date: 2021-06-17T00:02:21Z
• Authors: Yunfeng Peng; Bingyi Shen; Zhenzhong Wang; Ping Yang; Wei Yang; Guo Bi
• Keywords: Chemical Mechanical Planarization; Optical glass

Small-scale aspheric optical elements have an urgent market demand and a wide range of applications. With the development of science and technology and the increasing requirements on product quality, the polishing technology of small size aspheric optical elements is becoming much more important in the field of ultra-precision machining. This paper first gave a brief introduction of the commonly used material for small size aspherical optical lenses and molds. Then, the applicable polishing technologies and their development status were introduced in detail, which included the computer controlled optical surface (CCOS), abrasive jet polishing (AJP), magnetorheological finishing (MF), ion beam polishing (IBP), bonnet polishing (BP), chemical mechanical polishing (CMP), shear-thickening polishing (STP), laser polishing (LP), and several kinds of compound polishing technologies. Finally, the development of polishing technology for small size aspheric optical components was summarized and prospected.