The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

• DOI: 10.1007/s10854-006-9039-x
• Publication Date: 2006-09-06T14:49:00Z
• Authors: Yeon-Keon Moon; Se-Hyun Kim; Jong-Wan Park
• Keywords: Wurtzite crystal structure

Transparent, conducting, aluminum-doped zinc oxide (AZO) thin films were deposited on Corning 1737 glass by a DC magnetron sputter. The structural, electrical, and optical properties of the films, using various substrate temperatures, investigated. AZO fabricated with an ceramic target (Al2O3:2 wt%). obtained polycrystalline hexagonal wurtzite structure preferentially oriented in (002) crystallographic direction. lowest resistivity was 6.0 × 10−4Ω cm, carrier concentration 2.7 1020 cm−3 Hall mobility 20.4 cm2/Vs. average transmittance visible range above 90%.