Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates

• DOI: 10.1007/s11071-017-4007-y
• Publication Date: 2017-12-22T16:38:59Z
• Authors: Banafsheh Sajadi; Farbod Alijani; Hans Goosen; Fred van Keulen
• Keywords: Dynamics; Mechanical energy

Characterization of nonlinear behavior micro-mechanical components in MEMS applications plays an important role their design process. In this paper, dynamics, stability and pull-in mechanisms electrically actuated circular micro-plate subjected to a differential pressure are studied. For purpose, reduced-order model based on energy approach is formulated. It has been shown that dynamics micro-plate, the presence pressure, significantly differs from those under purely electrostatic loads. The may lose upon either saddle-node or period-doubling bifurcations. also found increasing DC AC voltages surprisingly help stabilize motion micro-plate.