Modeling and Characterization of Hybrid Thermo-Piezoelectric Cantilevers

• DOI: 10.1007/s11664-025-11836-4
• Publication Date: 2025-03-13T16:01:13Z
• Authors: Etienne Herth; Bruno Cavalliers; Sarra Salhi; Faten Kardous; Dame Fall; Lionel Rousseau; Laurie Valbin; Franck Lardet-Vie...
• Keywords: Characterization; Solid-state physics

Abstract This work investigates the design and performance of hybrid thermo-piezoelectric cantilevers (HTPCs) that enable combined piezoelectric and thermal actuation. Using COMSOL Multiphysics for multiphysics simulations and FreeFem++ for full thermo-piezoelectric coupling, we investigated the dynamic responses of HTPCs under different actuation conditions. The study focused on understanding the influence of material properties, especially Young’s modulus of aluminum nitride, on the resonant frequencies and displacement characteristics. Experimental validations with a laser Doppler vibrometer confirmed the simulation results and showed minimal frequency shifts in piezoelectric actuation and significant shifts in thermal modes. The results indicate that HTPCs hold promise for use in energy harvesting and microactuation systems.

Graphical Abstract