Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films

• DOI: 10.1007/s40544-013-0031-1
• Publication Date: 2013-11-23T13:39:27Z
• Authors: Li Qiang; Bin Zhang; Kaixiong Gao; Zhenbin Gong; Junyan Zhang
• Keywords: Fluorine; Amorphous carbon; Carbon fibers

Abstract Fluorine-incorporated hydrogenated fullerene-like nanostructure amorphous carbon films (F-FLC) were synthesized by employing the direct current plasma enhanced chemical vapor deposition (dc-PECVD) technique using a mixture of methane (CH 4 ), tetra-fluoromethane (CF and hydrogen (H 2 ) as working gases. The effect fluorine content on bonding structure, surface roughness, hydrophobic, mechanical, tribological properties was systematically investigated Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron (XPS), Raman analysis, atomic force microscope (AFM), contact angle goniometer, nano-indenter, reciprocating ball-on-disc tester, respectively. in increased from 0 to 2.1 at.% CF gas flow ratio 3 sccm, incorporated atoms existed form C-F X ( = 1, 2, 3) bonds film. fullerene embedded confirmed analysis. water significantly because doping, which indicates that hydrophobicity could be adjusted some extent doping. hardness elastic modulus remained relatively high (22 GPa) increased. Furthermore, friction coefficient reduced wear resistance