Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

• DOI: 10.1007/s41871-021-00102-w
• Publication Date: 2021-04-20T20:51:41Z
• Authors: Ralf Schienbein; Florian Fern; René Theska; Shraddha Supreeti; Roland Füßl; Eberhard Manske
• Keywords: Goniometer; Retroreflector; Repeatability; Position (finance)

Abstract The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This combination with the specific nature sensors tools limits addressable part geometries. An enhancement an NPMM is introduced by implementation rotational while keeping precision nanometer range. For this purpose, parameter-based dynamic evaluation system quantifiable technological parameters has been set up employed to identify assess general solution concepts adequate substructures. Evaluations taken show high potential for object two angular tool. influence additional rotation systems existing structure NPMMs investigated further on. Test series repeatability enhanced chosen rotary stage goniometer setup realized. As result these test series, necessity situ position determination tool became very clear. measured relation hemispherical reference mirror Fabry–Pérot interferometers. FEA optimization used enhance overall regard reproducibility long-term stability. Results have experimentally use retroreflector as various laser interferometers NPMM. knowledge gained formed into rules verification design solutions multiaxial machines.