Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering

• DOI: 10.1016/j.actamat.2022.118220
• Publication Date: 2022-08-04T21:57:33Z
• Authors: Samantha T. Jasze...; Eric R. Hoglund; Anna Costine; Marc H. Weber; Shelby S. Fields; Maria Gabriela Sales; Jaykumar Vaidya; Leah Bellcase; Katie Loughlin; Alejandro Salanova; Diane A. Dickie; Steven L. Wolfley; M. David Henry; Jon-Paul Maria; Jacob L. Jones; Nikhil Shukla; Stephen J. McDonnell; Petra Reinke; Patrick E. Hopkins; James M. Howe; Jon F. Ihlefeld
• Keywords: Hafnium