Thermochromic VO2 thin films synthesized by rf-inverted cylindrical magnetron sputtering

• DOI: 10.1016/j.apsusc.2007.12.021
• Publication Date: 2007-12-28T15:51:33Z
• Authors: J.B. Kana Kana; J.M. Ndjaka; P. Owono Ateba; B.D. Ngom; N. Manyala; O. Nemraoui; A.C. Beye; M. Maaza
• Keywords: Physical vapor deposition; Cavity magnetron; Stoichiometry; Thermochromism; Deposition; Vapour deposition

Abstract The novel physical vapor deposition called inverted cylindrical magnetron sputtering (also known as hollow cathode sputtering) is commonly used to coat wires, fibers, ribbons as well as all sides of three-dimensional substrates. It is a reproducible method for the production of nano-structured systems onto complex shapes substrates. This paper reports the first synthesis and feasibility of reliably reproduced stoichiometric pure textured VO 2 nano-structures by the rf-inverted cylindrical magnetron sputtering. Morphological, structural, elemental analysis and optical properties of synthesized VO 2 under optimized conditions are reported.