Wafer-scale growth of 2D SnSx hybrid films on germanium by atomic layer deposition for broadband photodetection

• DOI: 10.1016/j.apsusc.2024.160957
• Publication Date: 2024-08-10T15:27:48Z
• Authors: Yeonsik Choi; Bongkwon Son; Qimiao Chen; Kunze Lu; Donguk Nam; Sang Yeon Lee; Chuan Seng Tan; Jung-Yong Lee; Hyeongtag Jeon
• Keywords: Photodetection