PEALD deposited aluminum hafnium mixed oxide dielectrics for amorphous-IGZO TFTs

• DOI: 10.1016/j.ceramint.2023.11.286
• Publication Date: 2023-11-25T16:26:58Z
• Authors: Han-Bin Chen; Wan-Yu Wu; Yao-Tian Wang; Jia-Hao Yan; Ming-Jie Zhao; Xiao-Ying Zhang; Peng Gao; Dong-Sing Wuu; Feng-Min Lai; Shui-Yang Lien; Wen-Zhang Zhu
• Keywords: High-κ dielectric; Equivalent oxide thickness; Hafnium; X-ray reflectivity