First-principles insight into the pH-dependency of the corrosion inhibition ability of benzotriazole and 1,2,4-triazole for copper in chemical mechanical polishing slurry

• DOI: 10.1016/j.corsci.2024.112002
• Publication Date: 2024-03-20T17:34:35Z
• Authors: Pengfei Chang; Zisheng Huang; Huiqin Ling; Yunwen Wu; Ming Li; Tao Hang
• Keywords: Benzotriazole; Chemical Mechanical Planarization; Corrosion inhibitor; Triazole