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Material removal energy in ultraprecision machining of micro-lens arrays on single crystal silicon by slow tool servo

Cleavage (geology) Crystal (programming language)
DOI: 10.1016/j.jclepro.2021.130295 Publication Date: 2021-12-30T01:43:47Z
Abstract Supplemental Material References Cited by
AUTHORS (5)
Zejia Zhao
Tengfei Yin
Suet To
Zhiwei Zhu
Zhuoxuan Zhuang
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