Meander anisotropic magnetoresistance bridge geomagnetic sensors

• DOI: 10.1016/j.jsamd.2019.04.007
• Publication Date: 2019-04-26T16:37:50Z
• Authors: L.K. Quynh; B.D. Tu; N.T. Thuy; D.Q. Viet; N.H. Duc; A.T. Phung; D.T. Huong Giang
• Keywords: Alternative medicine; Geometry; Quantum mechanics; 01 natural sciences; Fabrication; Engineering; 0103 physical sciences; FOS: Electrical engineering, electronic engineering, information engineering; Pathology; FOS: Mathematics; Electrical and Electronic Engineering; Meander (mathematics); Optoelectronics; Materials of engineering and construction. Mechanics of materials; Magnetic flux; Magneto-Optical Devices for Integrated Photonics; Magnetic Skyrmions and Spintronics; Earth's magnetic field; Magnetoresistance; Electronic engineering; Physics; Space-based Magnetometers; Atomic and Molecular Physics, and Optics; Sensitivity (control systems); Materials science; Magnetic Sensors; Magnetic field; Physics and Astronomy; Electrical engineering; Physical Sciences; TA401-492; Medicine; Current Sensing; Magnetic Sensor Technology and Applications; Mathematics

لطالما تم استخدام مستشعرات المقاومة المغناطيسية متباينة الخواص (AMR) لتطبيقات صناعية محددة. يمكن تحسين حساسية اكتشاف المجال باستخدام مركزات التدفق المغناطيسي لتضخيم قوة المجال المغناطيسي المستشعرة في المستشعر. نبلغ عن تصميم وتصنيع مستشعر جسر AMR متعرج بحجم الميكرومتر مع طول فرع AMR فعال يبلغ 150. مكنتنا هندسة المستشعر هذه من تحقيق حساسية مغناطيسية تصل إلى 1.25 مللي فولط/أوي (أو 0.45 مللي فولط/فولط/أوي)، وهو تعزيز بعامل حوالي 300 مقارنة بمستشعرات AMR التقليدية القائمة على الأغشية الرقيقة. تمهد دراستنا مسارًا جديدًا لتصميم وتطبيق الأجهزة المغناطيسية الأرضية.<br/>Anisotropic magnetoresistive (AMR) sensors have long been used for specific industrial applications. Their field detection sensitivity can be improved using magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We report on the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry has enabled us to achieve a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to conventional AMR thin film-based capteurs. Our study paves a new pathway for the design and application of geomagnetic devices.<br/>Anisotropic magnetoresistive (AMR) sensors have long been used for specific industrial applications. Their field detection sensitivity can be improved by using magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We report on the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry has enabled us to achieve a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to conventional AMR thin film-based sensors. Our study paves a new pathway for the design and application of geomagnetic devices.<br/>Anisotrópico magnetoresistive (AMR) sensors have long been used for specific industrial applications. Their field detection sensitivity can be improved using magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We report on the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry has enabled us to achieve a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to conventional AMR thin film-based sensors. Our study paves a new pathway for the design and application of geomagnetic devices.<br/>Anisotropic magnetoresistive (AMR) sensors have long been used for specific industrial applications. Their field detection sensitivity can be improved using magnetic flux concentrators to amplify the magnetic field strength sensed at the sensor. We report on the design and fabrication of a micrometer-size meander AMR bridge sensor with an effective AMR branch length of 150. This sensor geometry has enabled us to achieve a magnetic sensitivity as high as 1.25 mV/Oe (or 0.45 mV/V/Oe), which is an enhancement by a factor of about 300 compared to conventional AMR thin film-based sensors. Our study paves a new pathway for the design and application of geomagnetic devices.<br/>