Calibration of beam vector deviation for four-axis precision on-machine measurement using chromatic confocal probe

• DOI: 10.1016/j.measurement.2022.111011
• Publication Date: 2022-03-21T17:11:25Z
• Authors: Mengmeng Xi; Yongqing Wang; Haibo Liu; Haowei Xiao; Xu Li; He Li; Zhi Ding; Zhenyuan Jia
• Keywords: Chromatic aberration; Accuracy and precision; Coordinate-measuring machine