Atomic layer etching technique for InAlN/GaN heterostructure with AlN etch-stop layer

• DOI: 10.1016/j.mssp.2022.106544
• Publication Date: 2022-02-01T14:34:56Z
• Authors: Fangzhou Du; Yang Jiang; Zepeng Qiao; Zhanxia Wu; Chuying Tang; Jiaqi He; Guangnan Zhou; Wei-Chih Cheng; Xinyi Tang; Qing Wang; Hongyu Yu
• Keywords: 0103 physical sciences; 01 natural sciences