Trench filling with phosphorus-doped monocrystalline and polycrystalline silicon

• DOI: 10.1016/j.mssp.2022.106549
• Publication Date: 2022-03-07T13:48:04Z
• Authors: J. Lespiaux; F. Deprat; B. Rodrigues Gonc...; J. Souc; F. Leverd; M. Juhel; J.-G. Mattei; C. Giroud-Garampon; A. Roman; T. Magis; J.M. Hartmann
• Keywords: Torr; Polycrystalline silicon