Examining the microstructure, morphological features, and wetting characteristics of Ti/TiN/TiAlN thin films produced through RF/DC magnetron co-sputtering

• DOI: 10.1016/j.mtcomm.2023.107405
• Publication Date: 2023-10-27T02:10:50Z
• Authors: Hichem Benzouid; Said Boudebane; Hana Ferkous; Fouaz Lekoui; Nafarizal Bin Nayan; Amel Delimi; Maha Awjan Alreshidi; Muhammad Arshad; Krishna Kumar Yadav; Barbara Ernst; Noureddine Elboug...; Yacine Benguerba
• Keywords: Pulsed DC