A novel green chemical mechanical polishing for potassium dihydrogen phosphate using corn oil slurry

• DOI: 10.1016/j.mtsust.2022.100257
• Publication Date: 2022-10-27T02:50:53Z
• Authors: X. Cui; Z. Zhang; C. Shi; F. Meng; G. Xu; W. Xie; Z. Liu; J. Wang; W. Wen
• Keywords: 02 engineering and technology; 0210 nano-technology