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Correlated characterization of 20Ne-implanted targets using nuclear reaction analysis, Rutherford backscattering spectrometry, and ion transport modeling

Nuclear reaction analysis Rutherford backscattering spectrometry Ion beam analysis Characterization Rutherford scattering
DOI: 10.1016/j.nima.2023.168654 Publication Date: 2023-09-03T08:50:48Z
Abstract Supplemental Material References Cited by
AUTHORS (9)
A.L. Cooper
S. Hunt
L. Downen
K. Setoodehnia
F. Portillo
C. Marshall
T.B. Clegg
A.E. Champagne
R. Longland
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