Influence of implantation and annealing temperatures on the irradiation damage in He2+ ion implanted 6H-SiC

• DOI: 10.1016/j.nimb.2025.165611
• Publication Date: 2025-01-13T20:54:11Z
• Authors: Hang Zang; Heng Yu; Tao Wang; Fang Liu; Chuanhao Chen; Pingan Zhou; Tan Shi; Huan He; Wenbo Liu; Chaohui He