Weak scratch detection and defect classification methods for a large-aperture optical element

• DOI: 10.1016/j.optcom.2016.10.062
• Publication Date: 2016-11-10T08:45:21Z
• Authors: Xian Tao; De Xu; Zheng-Tao Zhang; Feng Zhang; Xi-Long Liu; Da-Peng Zhang
• Keywords: Scratch; Aperture (computer memory)

Surface defects on optics cause optic failure and heavy loss to the optical system. Therefore, surface defects on optics must be carefully inspected. This paper proposes a coarse-to-fine detection strategy of weak scratches in complicated dark-field images. First, all possible scratches are detected based on bionic vision. Then, each possible scratch is precisely positioned and connected to a complete scratch by the LSD and a priori knowledge. Finally, multiple scratches with various types can be detected in dark-field images. To classify defects and pollutants, a classification method based on GIST features is proposed. This paper uses many real dark-field images as experimental images. The results show that this method can detect multiple types of weak scratches in complex images and that the defects can be correctly distinguished with interference. This method satisfies the real-time and accurate detection requirements of surface defects.