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A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor

0103 physical sciences 01 natural sciences
DOI: 10.1016/j.optlaseng.2022.107019 Publication Date: 2022-03-07T04:18:43Z
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AUTHORS (6)
Jiao Bai
Jingwen Li
Xiaohao Wang
Qian Zhou
Kai Ni
Xinghui Li
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