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Nanoscale surface roughness measurement based on frequency-domain interferometry principle

DOI: 10.1016/j.optlaseng.2024.108247 Publication Date: 2024-04-18T17:45:34Z
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AUTHORS (7)
Qiukun Zhang
Wenxuan Wang
Jialu Zhong
Jiewen Lin
Jinguo Chen
Manting Luo
Yingjie Yu
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