Characterization of amorphous Pt/ZnO films grown on silicon(100) substrates by a photochemical metal organic deposition and their potential use as gas sensors

• DOI: 10.1016/j.poly.2013.06.028
• Publication Date: 2013-06-27T12:59:56Z
• Authors: G.E. Buono-Core; A.H. Klahn; G. Cabello; L. Lillo
• Keywords: 01 natural sciences; 0104 chemical sciences

Abstract Pure and 10% Pt-loaded zinc oxide thin films have been successfully prepared by direct UV irradiation of bis(β-diketonate)zinc(II) and Pt(II) precursor complexes spin-coated on Si(1 0 0) substrates. The surface morphology of the films was characterized using atomic force microscopy (AFM) and it showed that the as-photodeposited films are amorphous and have a rougher surface than thermally treated films. The chemical composition of the films was determined by X-ray photoelectron spectroscopy (XPS). The results indicated the presence of ZnO and PtO on the surface of as-deposited loaded zinc oxide films. Gas sensing tests reveal that as-deposited 10% Pt/ZnO films exhibit a better response than pure ZnO films towards 20 ppm carbon monoxide at an operating temperature of 250 °C. The sensors also have fast response and recovery characteristics.