A novel linear-rotary piezoelectric positioning stage based on surface's rectangular trajectory driving

• DOI: 10.1016/j.precisioneng.2018.10.005
• Publication Date: 2018-10-18T11:42:58Z
• Authors: Shupeng Wang; Weibin Rong; Lefeng Wang; Hui Xie; Lining Sun; James K. Mills
• Keywords: Translational motion

Abstract This note proposes a novel linear-rotary piezoelectric positioning stage which utilizes a double octagon driving module to produce rectangular driving trajectories of a surface. A rotational pair is embedded into a translational pair to constitute the 2-DOF output end (mover/rotor). With the circulating driving trajectories, the device can deliver translational and rotational motions step by step. The two motion modes can be switched by controlling a piezo-stack, which contributes to the elimination of the interference between translational and rotational motions. Experimental results show that the stage can work in a stable manner. The working strokes/stepping resolution of the translational and rotational motions are 50 mm/19.85 nm and infinite/1.32 μrad, respectively. The maximum velocities/load capacity values are 1023.4 μm/s/10.78 N and 98210 μrad/s/13.72 N, respectively.