In-situ deflectometic measurement of transparent optics in precision robotic polishing
0103 physical sciences
01 natural sciences
DOI:
10.1016/j.precisioneng.2020.03.011
Publication Date:
2020-03-16T04:27:32Z
AUTHORS (5)
ABSTRACT
Abstract In the ultra-precision manufacturing of large optics, industrial robots have the potential to become an intelligent and economical choice of surface polishing. However, the transport of the workpieces between the polishing platform and the measurement instrument seriously limits the manufacturing efficiency. Therefore, an in-situ measurement system based on the monoscopic deflectometry is developed to determine the form quality of the optical lenses during rough polishing. Stray light reflected from the lower surface of transparent lenses may degrade the measuring quality, thus an effective absolute phase retrieval algorithm is developed to decouple the superposed fringes associated with the upper and lower surfaces. Then, the form of the upper surface under polishing can be reconstructed to guide the subsequent polishing. Experimental results demonstrate that the accuracy of the method is comparable to that of the coordinate measuring machine, consequently the manufacturing efficiency and reliability of large optical workpieces can be greatly improved.
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