Improving the densification of indium tin oxide targets via secondary cold isostatic pressing and oxygen exchange treatments

• DOI: 10.1016/j.scriptamat.2018.06.030
• Publication Date: 2018-06-22T06:39:23Z
• Authors: Fangsheng Mei; Tiechui Yuan; Ruidi Li; Kai Qin; Jingwei Huang
• Keywords: Hot isostatic pressing; Indium tin oxide

Abstract Traditional preparation technology is difficult to achieve near full densified indium tin oxide targets with thickness more than 10 mm. By introducing an anti-densification sintering model into studying the densification behavior of In2O3-SnO2 mixed powders, we proposed secondary cold isostatic pressing and oxygen exchange treatments to improve the densification of the targets by experiment. It is found that the application of secondary cold isostatic pressing and oxygen exchange treatments can increase the densification of targets and reduce the number and size of pores in sintered bodies effectively. Besides, two mechanism models were introduced to reveal the underlying causes.