Electromechanical design space exploration for electrostatically actuated ohmic switches using extended parallel plate compact model

• DOI: 10.1016/j.sse.2014.06.030
• Publication Date: 2014-07-05T14:00:18Z
• Authors: Antonios Bazigos; Christopher L. Ayala; Sunil Rana; Daniel Grogg; Montserrat Fernan...; Christoph Hagleitner; Tian Qin; Dinesh Pamunuwa; Adrian M. Ionescu
• Keywords: Robustness; Ohmic contact

The nanoscaled electrostatically actuated electromechanical ohmic switch is an emerging device with advanced performance in terms of ION/IOFF ratio. It is imperative that compact models accompany such novel devices in order to fully evaluate their potential at the circuit-level. A minimal, yet, adequate compact model is developed and analyzed in this work. Further, the model is used as a compass for switch design space exploration and, simultaneously, a corresponding parameter extraction methodology is compiled. The application on data from numerical simulations and on measurements of fabricated devices, verifies the potential of the model, while circuit-level simulations validate its robustness within an industrial IC design environment.