On the breakdown voltage temperature dependence of high-voltage power diodes passivated with diamond-like carbon

• DOI: 10.1016/j.sse.2022.108284
• Publication Date: 2022-03-10T15:59:00Z
• Authors: Luigi Balestra; Susanna Reggiani; Antonio Gnudi; Elena Gnani; Jagoda Dobrzyńska; Jan Vobecký
• Keywords: Breakdown voltage; Diamond-like carbon; Junction termination; Power diode; 0103 physical sciences; Diamond-Like Carbon, Power diode, Junction Termination, Breakdown Voltage; 7. Clean energy; 01 natural sciences

Diamond-Like Carbon (DLC) is well established material for the passivation of high voltage negative beveled power diode. In our previous works, the conduction mechanism of the DLC has been carefully described through the characterization and the physical modeling of Metal-Insulator-Semiconductor (MIS) structures. In addition, the effects on the breakdown voltage and leakage current have been clarified comparing the available experiments with numerical simulations. However, the role played by the DLC on the breakdown voltage temperature dependence is still lacking. In this work, it has been investigated assuming a release of the trapped charges with increasing temperatures.