Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1−xSixN thin films

• DOI: 10.1016/j.tsf.2008.08.126
• Publication Date: 2008-08-25T08:02:21Z
• Authors: A. Flink; J.M. Andersson; B. Alling; R. Daniel; J. Sjölén; L. Karlsson; L. Hultman
• Keywords: Spinodal decomposition

(Ti0.33Al0.67)1 − xSixN (0 ≤ x ≤ 0.29) thin solid films were deposited onto cemented carbide substrates by arc evaporation and analyzed using analytical electron microscopy, X-ray diffraction, nano ...