Microfabrication of dilute magnetic semiconducting Ti1−xCoxO2 films using photosensitive sol–gel method

• DOI: 10.1016/j.tsf.2010.10.043
• Publication Date: 2010-11-05T08:21:24Z
• Authors: Y. Chen; G. Zhao; Y. Ren; Z. Wang
• Keywords: 02 engineering and technology; 0210 nano-technology

Abstract Photosensitive Ti 1− x Co x O 2 gel films are prepared by chemical modification with benzoylacetone, and then their Fourier transform infrared spectra and ultraviolet visible spectra are measured. Results show that the chelate rings of benzoylacetone with Ti ions are formed in the Ti 1− x Co x O 2 gel films. With irradiation of UV light, the chelate rings are photolyzed, which leads to a change of the solubility of the Ti 1− x Co x O 2 gel films in methanol. Based on this, the micro-patterns of Ti 1− x Co x O 2 gel films are obtained. After the patterned gel films are dried at 200 °C and are fired at 550 °C for 1 h, negative patterned Ti 1− x Co x O 2 inorganic films are obtained. The Ti 1− x Co x O 2 films have an anantase structure and exhibit a room temperature ferromagnetic property.