Enhanced solid‐state electrolytes made of lithium phosphorous oxynitride films

• DOI: 10.1016/j.tsf.2012.09.007
• Publication Date: 2012-09-11T15:16:15Z
• Authors: J.F. Ribeiro; R. Sousa; J.P. Carmo; L.M. Gonçalves; M.F. Silva; M.M. Silva; J.H. Correia
• Keywords: Fast ion conductor

article i nfo Article history: This paper presents glassy films of lithium phosphorus oxynitride electrolyte with an amorphous structure and improved ionic conductivity suitable for solid-state batteries. The films of lithium phosphorus oxynitride electrolyte were obtained by deposition using the RF sputtering technique in a reactive N2 atmosphere. The measurements showed films with ionic conductivities in range of 10 −7 -10 −6 S·cm −1 , for temperatures between 22 °C and 43 °C. The depositions were done at several pressures (0.03 Pa, 0.7 Pa and 1 Pa) and for RF applied powers of 150 W and 200 W, in order to evaluate the best deposition set-point. The highest ionic conductivity of 10 −6 S·cm −1 was measured under a practical room temperature of 35 °C on the best films. These results are comparable with the related state-of-the-art.