Direct current magnetron sputtered ZrB2 thin films on 4H-SiC(0001) and Si(100)

• DOI: 10.1016/j.tsf.2013.11.040
• Publication Date: 2013-11-21T12:38:28Z
• Authors: Lina Tengdelius; Mattias Samuelsson; Jens Jensen; Jun Lu; Lars Hultman; Urban Forsberg; Erik Janzén; Hans Högberg
• Keywords: Elastic recoil detection; Texture (cosmology); Biasing; Cavity magnetron; Stoichiometry

ZrB2 thin films have been synthesized using direct current magnetron sputtering from a ZrB2 compound target onto 4H-SiC(0001) and Si(100) substrates kept at different temperatures (no heating, 400 ...