Measurement method of aberration from Ronchigram by autocorrelation function

• DOI: 10.1016/j.ultramic.2008.04.095
• Publication Date: 2008-06-20T08:14:05Z
• Authors: H. Sawada; T. Sannomiya; F. Hosokawa; T. Nakamichi; T. Kaneyama; T. Tomita; Y. Kondo; T. Tanaka; Y. Oshima; Y. Tanishiro; K. Takayanagi
• Keywords: Contrast transfer function

Aberrations up to the fifth-order were successfully measured using an autocorrelation function of the segmental areas of a Ronchigram. The method applied to aberration measurement in a newly developed 300kV microscope that is equipped with a spherical aberration corrector for probe-forming systems. The experimental Ronchigram agreed well with the simulated Ronchigram that was calculated by using the measured aberrations. The Ronchigram had an infinite magnification area with a half-angle of 50mrad, corresponding to the convergence angle of a uniform phase.