Bringing Electrochemical Three-Dimensional Printing to the Nanoscale

Nanometre
DOI: 10.1021/acs.nanolett.1c02847 Publication Date: 2021-10-26T23:50:30Z
ABSTRACT
Nanoscale 3D printing is attracting attention as an alternative manufacturing technique for a variety of applications from electronics and nanooptics to sensing, nanorobotics, energy storage. The constantly shrinking critical dimension in state-of-the-art technologies requires fabrication complex conductive structures with nanometer resolution. Electrochemical techniques are capable producing impurity-free metallic conductors superb electrical mechanical properties, however, true nanoscale resolution (<100 nm) remained unattainable. Here, we set new benchmark electrochemical printing. By employing nozzles dimensions small 1 nm, demonstrate layer-by-layer 25 nm diameter voxels. Full control the process allows adjustment feature size on-the-fly, tilted, overhanging structures. On basis experimental evidence, estimate limits discuss origins this frontier.
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