Skin-Inspired Self-Aligned Silicon Nanowire Thermoreceptors for Rapid and Continuous Temperature Monitoring

Resistance thermometer Silicon nanowires
DOI: 10.1021/acs.nanolett.4c05235 Publication Date: 2025-03-10T15:00:58Z
ABSTRACT
Real-time and precise evaluation of human body temperature offers crucial insights for health monitoring disease diagnosis, while integration high-performance miniaturized sensors remains a challenge. Inspired by the thermal sensory pathway skin, here we developed new route scalable fabrication rapid-response thermoreceptor using self-aligned in-plane silicon nanowire (SiNW) arrays as sensitive channels. These SiNW arrays, with diameter 100 ± 14 nm, were integrated into density 445 devices/cm2 without any high-precision lithography. The exhibited an excellent coefficient resistance -1.8%/°C, enabling spatial identification heat sources. They achieved real-time changes during breathing blowing activities, rapid response time ∼0.2 s recovery ∼1 s. This study provides robust foundation advanced biological applications.
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