Ultrathin Single Crystal Diamond Nanomechanical Dome Resonators

• DOI: 10.1021/nl202326e
• Publication Date: 2011-09-13T18:28:20Z
• Authors: Maxim K. Zalalutd...; Matthew P. Ray; Douglas M. Photiadis; Jeremy T. Robinson; Jeffrey W. Baldwin; James E. Butler; Tatyana I. Feygelson; Bradford B. Pate; Brian H. Houston
• Keywords: Q factor; Dome (geology); Crystal (programming language)

We present the first nanomechanical resonators microfabricated in single-crystal diamond. Shell-type only 70 nm thick, thinnest single crystal diamond structures produced to date, demonstrate a high-quality factor (Q ≈ 1000 at room temperature, Q 20 000 10 K) radio frequencies (50-600 MHz). Quality dependence on temperature and frequency suggests an extrinsic origin dominant dissipation mechanism methods further enhance resonator performance.