Density Doubling of Block Copolymer Templated Features

• DOI: 10.1021/nl203488a
• Publication Date: 2011-12-14T17:02:40Z
• Authors: Nathanael L. Y. Wu; Xiaojiang Zhang; Jeffrey N. Murphy; Jinan Chai; Kenneth D. Harris; Jillian M. Buriak
• Keywords: Block copolymer; Macromolecular Substances; Polymers; Surface Properties; nanolines; Molecular Conformation; self-assembly; 02 engineering and technology; solvent anneal; Nanostructures; Molecular Imprinting; thin films; Materials Testing; density doubling; Particle Size; Crystallization; 0210 nano-technology; Specific Gravity; graphoepitaxy

Block copolymers can be used to template large arrays of nanopatterns with periodicities equal the characteristic spacing polymer. Here we demonstrate a technique capitalizing on multilayered arrangement cylindrical domains effectively double pattern density templated by given By controlling initial thickness film and solvent annealing conditions, it was possible reproducibly create doubled lines swelling until bilayers horizontal cylinders were obtained. This process also demonstrated compatible graphoepitaxy.