422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

• DOI: 10.1038/s41467-021-21205-4
• Publication Date: 2021-02-10T22:27:28Z
• Authors: Matthew W. Puckett; Kaikai Liu; Nitesh Chauhan; Qiancheng Zhao; Naijun Jin; Haotian Cheng; Jianfeng Wu; Ryan O. Behunin; Peter T. Rakich; Karl D. Nelson; Daniel J. Blumenthal
• Keywords: Laser linewidth; Finesse; Waveguide; Q factor; Optical cavity

Abstract High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in photonic waveguide platform is to reducing cost, size, power sensitivity environmental disturbances. However, date, the Q of all-waveguide has been relegated below 260 Million. Here, we report Si 3 N 4 resonator with 422 Million intrinsic 3.4 Billion absorption-limited Qs. The 453 kHz intrinsic, 906 loaded, 57 linewidths corresponding 0.060 dB m −1 loss lowest reported date waveguides deposited oxide upper cladding. These results achieved through careful reduction scattering absorption losses that simulate, quantify correlate measurements. This advancement technology paves way cavities applications including nonlinear optics, atomic clocks, photonics high-capacity fiber communications.