Manual, In situ, Real-Time Nanofabrication using Cracking through Indentation

• DOI: 10.1038/srep18892
• Publication Date: 2016-01-04T11:26:02Z
• Authors: Koo Hyun Nam; Young D. Suh; Junyeob Yeo; Deokha Woo
• Keywords: Indentation

Abstract Nanofabrication has seen an increasing demand for applications in many fields of science and technology, but its production still requires relatively difficult, time-consuming expensive processes. Here we report a simple very effective one dimensional (1D) nano-patterning technology that suggests new nanofabrication method. This technique involves the control naturally propagating cracks initiated through simple, manually generated indentation, obviating necessity complicated equipment elaborate experimental environments such as those employ clean rooms, high vacuums fastidious maintenance processing temperatures. The channel fabricated with this can be narrow 10 nm unlimited length cross-sectional aspect ratio, accomplishment difficult even state-of-the-art e-beam lithography. More interestingly, fabrication speed controlled achieved to little several hundred micrometers per second. Along simplicity real-time capability technique, tunable makes method introduced here authentic situ experiments.