Layer-modulated, wafer scale and continuous ultra-thin WS2 films grown by RF sputtering via post-deposition annealing

• DOI: 10.1039/c6tc01954d
• Publication Date: 2016-07-19T13:02:10Z
• Authors: Sajjad Hussain; Muhammad Farooq Khan; Muhammad Arslan S...; Dhanasekaran Vikr...; Muhammad Zahir Iqbal; Dong-Chul Choi; Wooseok Song; Ki-Seok An; Yongho Seo; Jonghwa Eom; Wan-Gyu Lee; Jongwan Jung
• Keywords: 02 engineering and technology; 0210 nano-technology; 7. Clean energy

Synthesis of large-area WS2 films by direct sulfurization of RF-sputtered WO3 thin films on insulating substrates.