Photo-enhanced metal-assisted chemical etching of α-gallium oxide grown by halide vapor-phase epitaxy on a sapphire substrate and its applications

• DOI: 10.1039/d3ma00424d
• Publication Date: 2023-09-05T00:01:45Z
• Authors: Woong Choi; Dae-Woo Jeon; Ji-Hyeon Park; Dongryul Lee; Soobeen Lee; Kwang Hyeon Baik; Jihyun Kim

Our study presents photo-enhanced metal-assisted chemical etching of α-Ga2O3 and its properties at various temperatures. The results show great potential for use in α-Ga2O3-based optoelectronic device fabrication.